About Semiconductor Chillers & BV Thermal Systems
Controlling the temperature is critical in the production of semiconductor devices. This sensitive process requires accuracy when dealing with liquid cooling or air condition cooling. BV Thermal Systems is able to provide accurate, precise and cost effective semiconductor chillers for accurate temperature control for chip manufacturing technologies.
Specifications for Semiconductor Chillers
| MODEL | MC025 | MC033 | MC050 | MC075 |
|---|---|---|---|---|
| Cooling Capacity | 861 watts @ 20°C | 1119 watts @ 20°C | 1702 watts @ 20°C | 2681 watts @ 20°C |
| Stability | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C |
| Temperature Range | +5°c to +30°c | +5°c to +30°c | +5°c to +30°c | +5°c to +30°c |
| Pump | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI |
| Reservoir Volume | 1.3 gal | 1.3 gal | 1.3 gal | 1.3 gal |
| Dimensions (w x d x h) in | 14.5 x 22 x 29 | 14.5 x 22 x 29 | 24.125 x 31.125 x 36 | 24.125 x 31.125 x 36 |
| Power Requirements | 115V, 9A | 115V, 12A | 200-230V, 8A | 200-230V, 10A |
| Weight (lbs) | 30 | 130 | 142 | 180 |
| MODEL | MC100 | MC150 | MC200 |
|---|---|---|---|
| Cooling Capacity | 3575 watts @ 20°C | 5480 watts @ 20°C | 6916 watts @ 20°C |
| Stability | ±0.1°C | ±0.1°C | ±0.1°C |
| Temperature Range | +5°c to +30°c | +5°c to +30°c | +5°c to +30°c |
| Pump | 2.2 GPM to 99 PSI | 4.0 GPM to 99 PSI | 4.0 GPM to 99 PSI |
| Reservoir Volume | 2 gal | 2 gal | 7 gal |
| Dimensions (w x d x h) in | 24.125 x 31.125 x 36 | 24.125 x 31.125 x 36 | 38 x 32 x 39 |
| Power Requirements | 200-230V, 12A | 200-230V, 20A | 200-230V, 17A |
| Weight (lbs) | 258 | 270 | 404 |
| MODEL | MC300 | MC400 | MC500 | MC600 |
|---|---|---|---|---|
| Cooling Capacity | 10,492 watts @ 20°C | 13,247 watts @ 20°C | 17,614 watts @ 20°C | 20,955 watts @ 20°C |
| Stability | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C |
| Temperature Range | +5°c to +30°c | +5°c to +30°c | +5°c to +30°c | +5°c to +30°c |
| Pump | 4.0 GPM to 99 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI |
| Reservoir Volume | 7 gal | 7 gal | 7 gal | 7 gal |
| Dimensions (w x d x h) in | 38.5 x 32 x 39 | 48.5 x 33 x 48 | 48.5 x 33 x 48 | 65 x 45 x 42.25 |
| Power Requirements | 200-230V, 20A | 200-230V-3, 16A | 200-230V-3, 20A | 200-230V-3, 22A |
| Weight (lbs) | 442 | 484 | 531 | 720 |
| MODEL | MC800 | MC1000 | MC1500 |
|---|---|---|---|
| Cooling Capacity | 25,644 watts @ 20°C | 33,704 watts @ 20°C | 59,700 watts @ 20°C |
| Stability | ±0.1°C | ±0.1°C | ±0.1°C |
| Temperature Range | +5°c to +30°c | +5°c to +30°c | +5°c to +30°c |
| Pump | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 20 GPM to 40 PSI |
| Reservoir Volume | 7 gal | 7 gal | 7 gal |
| Dimensions (w x d x h) in | 65 x 45 x 42.25 | 65 x 45 x 42.25 | 65 x 45 x 42.25 |
| Power Requirements | 200-230V-3, 26A | 460V-3, 20A | 460V-3, 28A |
| Weight (lbs) | 825 | 955 | 1100 |
About Semiconductor Chillers
It is well known that the semiconductor industry has certain criteria for temperature control which if met results in greater yields during rapid thermal processing of silicon wafers. The Semiconductor Chillers engineered, designed and manufactured by BV Thermal Systems are up to this rigorous challenge and offer continuous cooling with a standard temperature range from +5° to +30°C. Featuring a low profile design with high quality non-marring locking casters, the Semiconductor Chillers provide a small footprint with exceptional performance and unmatched reliability. It is this combination that makes them the preferred choice for OEM’s and others.
Designed, engineered, manufactured and thoroughly tested in the United States the standard recirculating semiconductor chillers feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chillers are designed to provide years of reliable and accurate liquid temperature control.
If your process requires customization, BV Thermal Systems will engineer, design and manufacture to meet your requirements whether it be footprint, thermal load, size, operating conditions or portability.
With environmentally friendly CFC refrigerant the Semiconductor Chillers feature corrosion free wetted surfaces. With the largest selection of options in the industry, the Semiconductor Chiller may be designed and manufactured to your exact requirements and specifications.
Semiconductor Chiller Features
- Full featured PID controller with easy Auto-tuning
- External pressure – flow adjustment
- One positive displacement pump on 60Hz
- Corrosion free wetted surfaces
- Adjustable high & Low temperature alarms
- Level, flow & temperature remote signals
- Hot gas bypass
- Seamless polyethylene tank
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