BV Thermal Systems Manufactures Chillers for Semiconductors
Controlling the temperature is crucial in the production of semiconductors. This intricate process requires cooling precision to ensure quality processing of silicon wafers for the semiconductor industry. Our Chillers for Semiconductors offer accurate cooling with temperature from +5° to +30°C. Featuring a low profile design with high quality, non-marring, locking casters, the Chillers for Semiconductors provide a small footprint with exceptional performance and unmatched reliability. It is
this combination that makes them the preferred choice.
Manufactured and thoroughly tested in the United States the chillers for semiconductors feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Chillers for Semiconductors are designed to provide years of reliable liquid temperature control.
With environmentally friendly CFC refrigerant the Chillers for Semiconductors feature corrosion free wetted surfaces. With the largest selection of options in the industry, the Chillers for Semiconductors may be designed and manufactured to your exact requirements and specifications.
Features of Chillers for Semiconductors
- External pressure – flow adjustment
- Full featured PID controller with easy Auto-tuning
- Hot gas bypass
- Level, flow and temperature remote signals
- Corrosion free wetted surfaces
- Adjustable high and low temperature alarms
- High quality, low hammer solenoid cooling control valve
- Four locking casters with non-marring wheels
- Seamless polyethylene tank with easy fill 3″ port
Chillers for Semiconductors – Specifications
MODEL | MC025 | MC033 | MC050 | MC075 |
---|---|---|---|---|
Cooling Capacity | 828 watts @ 20°C | 1073 watts @ 20°C | 1764 watts @ 20°C | 2393 watts @ 20°C |
Stability | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C |
Temperature Range | +5°c to +27°c | +5°c to +27°c | +5°c to +27°c | +5°c to +27°c |
Pump | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI | 2.2 GPM to 99 PSI |
Reservoir Volume | 1.3 gal | 1.3 gal | 1.3 gal | 1.3 gal |
Dimensions (w x d x h) in | 14.5 x 22 x 29 | 14.5 x 22 x 29 | 14.5 x 22 x 29 | 14.5 x 22 x 29 |
Power Requirements | 115V, 9A | 115V, 12A | 200-230V, 8A | 200-230V, 10A |
Weight (lbs) | 30 | 130 | 142 | 180 |
MODEL | MC100 | MC150 | MC200 |
---|---|---|---|
Cooling Capacity | 3163 watts @ 20°C | 4895 watts @ 20°C | 7000 watts @ 20°C |
Stability | ±0.1°C | ±0.1°C | ±0.1°C |
Temperature Range | +5°c to +27°c | +5°c to +27°c | +5°c to +27°c |
Pump | 2.2 GPM to 99 PSI | 4.0 GPM to 99 PSI | 4.0 GPM to 99 PSI |
Reservoir Volume | 2 gal | 2 gal | 7 gal |
Dimensions (w x d x h) in | 36 x 27 x 29.75 | 36 x 27 x 29.75 | 38 x 32 x 39 |
Power Requirements | 230V, 12A | 230V, 20A | 230V, 17A |
Weight (lbs) | 258 | 270 | 404 |
MODEL | MC300 | MC400 | MC500 | MC600 |
---|---|---|---|---|
Cooling Capacity | 10,000 watts @ 20°C | 12,800 watts @ 20°C | 16,400 watts @ 20°C | 20,000 watts @ 20°C |
Stability | ±0.1°C | ±0.1°C | ±0.1°C | ±0.1°C |
Temperature Range | +5°c to +27°c | +5°c to +27°c | +5°c to +27°c | +5°c to +27°c |
Pump | 4.0 GPM to 99 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 10 GPM to 40 PSI |
Reservoir Volume | 7 gal | 7 gal | 7 gal | 7 gal |
Dimensions (w x d x h) in | 38.5 x 32 x 39 | 48.5 x 33 x 48 | 48.5 x 33 x 48 | 65 x 45 x 42.25 |
Power Requirements | 230V, 20A | 230V-3, 16A | 230V-3, 20A | 230V-3, 22A |
Weight (lbs) | 442 | 484 | 531 | 720 |
MODEL | MC800 | MC1000 | MC1500 |
---|---|---|---|
Cooling Capacity | 26,000 watts @ 20°C | 34,500 watts @ 20°C | 52,000 watts @ 20°C |
Stability | ±0.1°C | ±0.1°C | ±0.1°C |
Temperature Range | +5°c to +27°c | +5°c to +27°c | +5°c to +275°c |
Pump | 10 GPM to 40 PSI | 10 GPM to 40 PSI | 20 GPM to 40 PSI |
Reservoir Volume | 7 gal | 7 gal | 7 gal |
Dimensions (w x d x h) in | 65 x 45 x 42.25 | 65 x 45 x 42.25 | 65 x 45 x 42.25 |
Power Requirements | 230V-3, 26A | 460V-3, 20A | 460V-3, 28A |
Weight (lbs) | 825 | 955 | 1100 |
Chillers for Semiconductors – Applications
- CVD/PVD
- Laser Marking and Trimming
- Etch/Ashing, Wet Etch
- Cabinet Cooling
- Polishing/Grinding
- Implant
- RTP
- Handlers and Testers
- Lithography
- Die Packaging and Die Testing
- Mass Spectroscopy (MS)
- Cutting/Dicing
- Inductively Coupled Plasma and Atomic Absorptions Spectrometry (ICP/AA)
- MOCVD
- Crystal Growning
- CMP