Chillers for Semiconductors

Chillers and Heat Exchangers from BV Thermal Systems used in the Semiconductor Industry

BV Thermal Systems Manufactures Chillers for Semiconductors

Controlling the temperature is crucial in the production of semiconductors.  This intricate process requires cooling precision to ensure quality processing of silicon wafers for the semiconductor industry.  Our Chillers for Semiconductors offer accurate cooling with temperature from +5° to +30°C.  Featuring a low profile design with high quality, non-marring, locking casters, the Chillers for Semiconductors provide a small footprint with exceptional performance and unmatched reliability.  It isSemiconductor Wafer from BV Thermal Systems this combination that makes them the preferred choice.

Whether it is lithography, implant, etch, deposition, planarization, packaging or semiconductor testing, our Semiconductor Chillers support your entire process.  With over 40 years of temperature control expertise in the Semiconductor industry, we offer standard, and specially customized products, temperature control technical expertise, and a global service footprint to help meet your demanding Semi processes from lithography to final test.

Manufactured and thoroughly tested in the United States the chillers for semiconductors feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Chillers for Semiconductors  are designed to provide years of reliable liquid temperature control.

With environmentally friendly CFC refrigerant the  Chillers for Semiconductors feature corrosion free wetted surfaces.  With the largest selection of options in the industry, the Chillers for Semiconductors may be designed and manufactured to your exact requirements and specifications.

Features of Chillers for Semiconductors

  • External pressure – flow adjustment
  • Full featured PID controller with easy Auto-tuning
  • Hot gas bypass
  •  Level, flow and temperature remote signals
  •  Corrosion free wetted surfaces
  •  Adjustable high and low temperature alarms
  •  High quality, low hammer solenoid cooling control valve
  •  Four locking casters with non-marring wheels
  • Seamless polyethylene tank with easy fill 3″ port

 Chillers for Semiconductors – Specifications

MODEL MC025 MC033 MC050 MC075
Cooling Capacity 828 watts @ 20°C 1073 watts @ 20°C 1764 watts @ 20°C 2393 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI
Reservoir Volume 1.3 gal 1.3 gal 1.3 gal 1.3 gal
Dimensions (w x d x h) in 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29
Power Requirements 115V, 9A 115V, 12A 200-230V, 8A 200-230V, 10A
Weight (lbs) 30 130 142 180

MODEL MC100 MC150 MC200
Cooling Capacity 3163 watts @ 20°C 4895 watts @ 20°C 7000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 2.2 GPM to 99 PSI 4.0 GPM to 99 PSI 4.0 GPM to 99 PSI
Reservoir Volume 2 gal 2 gal 7 gal
Dimensions (w x d x h) in 36 x 27 x 29.75 36 x 27 x 29.75 38 x 32 x 39
Power Requirements 230V, 12A 230V, 20A 230V, 17A
Weight (lbs) 258 270 404

MODEL MC300 MC400 MC500 MC600
Cooling Capacity 10,000 watts @ 20°C 12,800 watts @ 20°C 16,400 watts @ 20°C 20,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 4.0 GPM to 99 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 38.5 x 32 x 39 48.5 x 33 x 48 48.5 x 33 x 48 65 x 45 x 42.25
Power Requirements 230V, 20A 230V-3, 16A 230V-3, 20A 230V-3, 22A
Weight (lbs) 442 484 531 720

MODEL MC800 MC1000 MC1500
Cooling Capacity 26,000 watts @ 20°C 34,500 watts @ 20°C 52,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +275°c
Pump 10 GPM to 40 PSI 10 GPM to 40 PSI 20 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25
Power Requirements 230V-3, 26A 460V-3, 20A 460V-3, 28A
Weight (lbs) 825 955 1100

 Chillers for Semiconductors – Applications

  • CVD/PVD
  • Laser Marking and Trimming
  • Etch/Ashing, Wet Etch
  • Cabinet Cooling
  • Polishing/Grinding
  • Implant
  • RTP
  • Handlers and Testers
  • Lithography
  • Die Packaging and Die Testing
  • Mass Spectroscopy (MS)
  • Cutting/Dicing
  • Inductively Coupled Plasma and Atomic Absorptions Spectrometry (ICP/AA)
  • MOCVD
  • Crystal Growning
  • CMP

Testimonial

“ They are bullet proof, (chillers), they start right up and never have a problem”CTC - Chiller Customer

Gerald StemCTC